Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications
نویسندگان
چکیده
منابع مشابه
Electrical Activity of Boron and Phosphorus in Hydrogenated Amorphous Silicon
A. Pandey, B. Cai, N. Podraza, and D. A. Drabold Department of Physics and Astronomy, Condensed Matter and Surface Science Program, Ohio University, Athens, Ohio 45701, USA Department of Radiation Oncology, Washington University School of Medicine, St. Louis, Missouri 63108, USA Department of Physics and Astronomy, University of Toledo, Toledo, Ohio 43606, USA Department of Physics and Astronom...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2017
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927617008091